JPH03115662U - - Google Patents
Info
- Publication number
- JPH03115662U JPH03115662U JP2554490U JP2554490U JPH03115662U JP H03115662 U JPH03115662 U JP H03115662U JP 2554490 U JP2554490 U JP 2554490U JP 2554490 U JP2554490 U JP 2554490U JP H03115662 U JPH03115662 U JP H03115662U
- Authority
- JP
- Japan
- Prior art keywords
- gate valve
- valve
- film forming
- box body
- entrance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2554490U JPH03115662U (en]) | 1990-03-12 | 1990-03-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2554490U JPH03115662U (en]) | 1990-03-12 | 1990-03-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03115662U true JPH03115662U (en]) | 1991-11-29 |
Family
ID=31528476
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2554490U Pending JPH03115662U (en]) | 1990-03-12 | 1990-03-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03115662U (en]) |
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1990
- 1990-03-12 JP JP2554490U patent/JPH03115662U/ja active Pending